Affiliation:
1. Northrop Research and Technology Center, Palos Verdes Peninsula, California 90274
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
25 articles.
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1. Ion Implantation;Integrated Circuit Fabrication;2023-11-16
2. Ion Implantation in Wide Bandgap Semiconductors;Processing of Wide Band Gap Semiconductors;2000
3. Ion implantation in group III-nitride semiconductors: a tool for doping and defect studies;Journal of Crystal Growth;1997-06
4. Electrical and optical characterization of Cd+ and P+ dually ion-implanted GaAs;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1997-05
5. Simulation of uphill diffusion behaviour of Si-implanted GaAs;Modelling and Simulation in Materials Science and Engineering;1996-11-01