Multi-Scale Thickness and Roughness Characterization of Thin Silicon-On-Insulator Films-Reference-Cited by-同舟云学术

Multi-Scale Thickness and Roughness Characterization of Thin Silicon-On-Insulator Films

Published:2013 Issue:9 Volume:2 Page:P357-P361
ISSN:2162-8769
Container-title:ECS Journal of Solid State Science and Technology
language:en
Short-container-title:ECS J. Solid State Sci. Technol.

Author:

Acosta-Alba Pablo E.,Kononchuk Oleg,Riou Grégory,Moulin Cécile,Bertrand-Giuliani Christelle,Claverie Alain

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference25 articles.

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3. Weber et al O. , in Electron Devices Meeting (IEDM), 2008 (1–4) IEEE International.

4. Transistor matching and silicon thickness variation in ETSOI technology

5. Analyzing atomic force microscopy images using spectral methods

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