Affiliation:
1. IBM Corporation, General Technology Division, Essex Junction, Vermont 05452
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
18 articles.
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1. Silicides;digital Encyclopedia of Applied Physics;2003-04-15
2. Role of oxygen in ion-enhanced etching of poly-Si and WSix with chlorine;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1998-07
3. Reactivity of O2 with Si(111) surfaces with different surface structures;Applied Surface Science;1998-06
4. Silicides and ohmic contacts;Materials Chemistry and Physics;1998-02
5. Formation and stability of silicides on polycrystalline silicon;Materials Science and Engineering: R: Reports;1996-02