Author:
Tzanavaras Andrew,Young Gregory,Gleixner Stacy
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
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4. Copper Electroplating for Damascene ULSI Interconnects
5. Characterization of Plated Cu Thin Film Microstructures
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