Author:
Blanquet Elisabeth,Nuta Ioana,Brizé Virginie,Boichot Raphaël,Mantoux Arnaud,Violet Perrine,Daniele Stéphane
Publisher
The Electrochemical Society
Cited by
2 articles.
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1. ALD Simulations;Atomic Layer Deposition for Semiconductors;2013-10-19
2. Atomic-scale simulation of ALD chemistry;Semiconductor Science and Technology;2012-06-22