Affiliation:
1. Dept. of Material Science and Engineering and School of Electrical Engineering, Cornell University, Ithaca, New York 14853
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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1. Characterization of structure/dopant behavior by electron microscopy;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-01
2. On the spatial resolution of two-dimensional doping profiles as measured using secondary ion mass spectrometry tomography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-01
3. Methods for the measurement of two-dimensional doping profiles;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1992-01