Author:
Wang Wei-Chih,Tsui Chi Leung,Estroff Benjamin
Abstract
In this paper, we present the design and fabrication of a 2D beam steering device using cascaded prism and grating deflectors. The device, based on a single prism with a maximum deflection angle of 5.6{degree sign}, is able to achieve a maximum deflection angle of 29.2o for the cascaded three-prism stage design in the horizontal direction, a 4.6o deflection angle from the grating stage in the vertical direction, and a collimated 4µm beam diameter profile.
Publisher
The Electrochemical Society
Cited by
6 articles.
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