Fluorine Etching in Porous Silicon: An Ab-Initio Molecular Dynamics Study
Author:
Funder
CONACYT of Mexico
UNAM-DGAPA-PAPIIT
Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Reference29 articles.
1. Lehmann V. , Electrochemistry of silicon: instrumentation, science, materials and applications, p. 5, Wiley-VCH Verlag, Weinheim, (2002).
2. Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers
3. Electrostatic gas sensor with a porous silicon diaphragm
4. Fabrication and Characterization of a Porous Silicon Drug Delivery System with an Initiated Chemical Vapor Deposition Temperature-Responsive Coating
5. Fabrication and application of porous silicon multilayered microparticles in sustained drug delivery
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. An examination of the performance of molecular dynamics force fields: Silicon and silicon dioxide reactive ion etching;Journal of Vacuum Science & Technology A;2024-02-12
2. Charge Influence on the Nitrogen Molecule Adsorption in Porous Silicon: An Ab Initio Molecular Dynamics Study;physica status solidi (b);2019-08-23
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