YSZ Films Prepared by Reactive Magnetron Sputtering: Effect of the Thickness on the Electrical Properties

Abstract

Lowering the SOFC operating temperature is a major challenge. Using conventional electrolyte materials, a solution consists in preparing thin layers to limit the ohmic losses. The coatings are synthesized by sputtering a metallic Zr-16 at%Y target in the presence of a reactive argon-oxygen discharge. The deposition stage is controlled by Plasma Emission Monitoring in order to guarantee a high sputtering rate. The influence of the thickness on the electrical properties is determined by impedance spectroscopy.