Affiliation:
1. Siemens AG, Research Laboratories, 8 München 80, Germany
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
15 articles.
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1. Lithography;Technology of Integrated Circuits;2000
2. Modeling of electron backscattering from topographic marks;Journal of Applied Physics;1996-12-15
3. Lithographie;Halbleiter-Elektronik;1996
4. Radiation Exposure;Semiconductor Lithography;1988
5. Lithographie;Halbleiter-Elektronik;1988