Affiliation:
1. Research Laboratory, Siemens ZFE SPT 12, D‐8000 Munich 83, Germany
2. Duke University, School of Engineering, Durham, North Carolina 27706
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
16 articles.
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1. Investigation of MeV-Cu implantation and channeling effects into porous silicon formation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2011-11
2. MEMS Wet-Etch Processes and Procedures;MEMS Reference Shelf;2011
3. Electrochemistry of Silicon Etching;Encyclopedia of Electrochemistry;2007-02-23
4. Isovalent Impurities;Computational Microelectronics;2004
5. Defects in carbon and oxygen implanted p-type silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-01