Author:
De Gendt Stefan,Adelmann Christoph,Delabie Annelies,Nyns Laura,Pourtois Geoffrey,Van Elshocht Sven
Abstract
The paper aims at presenting a concise overview of the process development and material issues often encountered during the development of dielectric deposition processes, and make you reminiscence of the past when 'good old' silicondioxide dominated the dielectric landscape.
Publisher
The Electrochemical Society
Cited by
2 articles.
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