Smart Polishing of Hard-to-Machine Materials with an Innovative Dilatancy Pad under High-Pressure, High-Speed, Immersed Condition

Author:

Doi Toshiro K.,Seshimo Kiyoshi,Yamazaki Tsutomu,Ohtsubo Masanori,Ichikawa Daizo,Miyashita Tadakazu,Takagi Masataka,Saeki Taku,Aida Hideo

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Doi T. K. , “Open innovation for a brighter future,” NATUREJOBS (2013), p.13.

2. Doi T. Yamazaki T. Seshimo K. Ichikawa D. , “Development of the polishing process technology of the crystal substrates for green devices (1st report)-Foundation of a Multi-Industry & University Join Research Project-, J23,” Proc. of JSPE spring meeting (2013), pp.631.

3. The Mechanism of Dilatancy

4. Colloidal Silica Polishing Based on Micro-Mechanical Removal Action and Its Application;Karaki-Doy;Sensors and Materials,1989

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