Author:
Lee Yong Ju,Kang Sang-Won
Publisher
The Electrochemical Society
Subject
Electrical and Electronic Engineering,Electrochemistry,Physical and Theoretical Chemistry,General Materials Science,General Chemical Engineering
Reference15 articles.
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The Chemistry of Metal CVD
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2. D. L. Smith,
Thin-Film Deposition
, p. 307, McGraw-Hill, Singapore (1996).
3. Selective aluminum chemical vapor deposition
4. In Situ Monitoring of Al Growth in Chemical Vapor Deposition by Detecting Reflected Laser Light Intensity
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