Combining Ta[sub 2]O[sub 5] and Nb[sub 2]O[sub 5] in Bilayered Structures and Solid Solutions for Use in MIM Capacitors-Reference-Cited by-同舟云学术

Combining Ta[sub 2]O[sub 5] and Nb[sub 2]O[sub 5] in Bilayered Structures and Solid Solutions for Use in MIM Capacitors

Published:2005 Issue:5 Volume:152 Page:F54
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:en
Short-container-title:J. Electrochem. Soc.

Author:

Matsui Yuichi,Hiratani Masahiko,Kimura Shinichiro,Asano Isamu

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Y. Nakamura, I. Asano, M. Hiratani, T. Saito, and H. Goto , inDigest of 2001 Symposium on VLSI Technology, Kyoto, p. 39 (2001).

2. Hexagonal polymorph of tantalum–pentoxide with enhanced dielectric constant

3. The Modifications of Niobium Pentoxide

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