Author:
Lee Jooyoung,Kim Dojun,Kim Oh Hyun,Anderson Tim,Koller Jürgen,Denomme Dan,Habibi Sophia Z.,McElwee-White Lisa
Abstract
The gas-phase decomposition pathways of the tungsten dimethylhydrazido complexes Cl4(RCN)W(NNMe2) (1a: R = CH3; 1b: R = Ph), precursors for single source deposition of WNxCy, were investigated using a combination of experiments and calculations. Raman scattering experiments were performed in an impinging-jet, up-flow, aerosol-assisted CVD reactor to identify reaction intermediates. Density Functional Theory calculations (B3LYP/LanL2DZ) were used to estimate Raman active frequencies and explore the reaction surface. Dimethylamine and methylmethyleneimine, products from N-N cleavage of the hydrazido ligand, were observed under deposition conditions and identified by comparison with previously reported Raman shifts and calculated frequencies.
Publisher
The Electrochemical Society
Cited by
3 articles.
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