Author:
Matsumura Hideki,Ohdaira Keisuke
Abstract
Cat-CVD (Catalytic Chemical Vapor Deposition), often called "Hot-Wire CVD", is a new deposition method, in which source gas molecules are decomposed by catalytic cracking reaction with a heated catalyzer. The difference between Cat-CVD and the conventional plasma enhanced CVD (PECVD) is explained through discussion on their deposition mechanisms. The various films prepared by Cat-CVD and their qualities are summarized along with their applications.
Publisher
The Electrochemical Society
Cited by
2 articles.
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