Optimization and Characterization of LPCVD TiB2 for ULSI Applications-Reference-Cited by-同舟云学术

Optimization and Characterization of LPCVD TiB2 for ULSI Applications

Published:1991-10-01 Issue:10 Volume:138 Page:3053-3061
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:
Short-container-title:J. Electrochem. Soc.

Author:

Choi C. S.¹²³,Ruggles G. A.¹²³,Osburn C. M.¹²³,Xing G. C.¹²³

Affiliation:

1. Department of Electrical and Computer Engineering, North Carolina State University, Raleigh, North Carolina 27695

2. Department of Electrical and Computer Engineering, North Carolina State University, Raleigh, North Carolina and MCNC, Center for Microelectronics, Research Triangle Park, North Carolina 27709

3. Department of Material Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1149/1.2085366/pdf

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