Author:
Lee W. P.,Yow H. K.,Tou T. Y.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Reference31 articles.
1. A New Method for Transmission Electron Microscope Observation of Grown-in Defects in As-Grown Czochralski Silicon (111) Crystals
2. Analysis of Side-Wall Structure of Grown-in Twin-Type Octahedral Defects in Czochralski Silicon
3. Recognition of D defects in silicon single crystals by preferential etching and effect on gate oxide integrity
4. Influence of Crystal-Originated “Particle” Microstructure on Silicon Wafers on Gate Oxide Integrity
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