Coating and Wear Resistance of Ceramic Films from Alkoxide Solutions by Atmosphere Controlled Thermal Plasma CVD

Author:

Tsujino Jiro,Yamazaki Isao,Shimada Shiro

Publisher

Japan Society of Powder and Powder Metallurgy

Subject

Materials Chemistry,Metals and Alloys,Industrial and Manufacturing Engineering,Mechanical Engineering

Reference8 articles.

1. 1) T. Yoshida and J. Kambara: "Thermal plasma processing", Vacuum Journal, 93 (2004) 3-9.

2. Preparation of composite and compositionally graded TiC?TiN films by liquid injection plasma-enhanced CVD

3. 3) S. Shimada, Y. Takada, and J. Tsujino: "Preparation and Oxidation of Composite TiN-AlN Films from Alkoxide Solutions by Plasma enhanced CVD", J. Euro. Ceram. Soc., 25 (2005) 1765-1770.

4. 4) S. Shimada: "Preparation of monolithic, composite, and compositional graded films of nitrides, carbides, borides and oxides by thermal plasma CVD", Materials Integration, 20 (2007) 13-18.

5. Deposition and wear resistance of Ti–B–N–C coatings on WC–Co cutting tools from alkoxide solutions by thermal plasma CVD

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