Study of Thin Films and Multilayers using Energy-Dispersive Diffraction of Synchrotron Radiation

Abstract

AbstractWe present the results of a preliminary study of the use of polychromatic synchrotron radiation in energy-dispersive mode for the rapid characterization of thin film and multilayer materials. This technique takes advantage of the high intensity and excellent collimation properties of white beam synchrotron radiation. The glancing angle diffraction geometry allows structural depth probing as well as enhanced signal-to-noise by suppressing substrate contributions. The technique was successfully applied to metallic films a few hundred Angstroms thick, and to W-C multilayers.