A broadband, capacitive, surface-micromachined, omnidirectional microphone with more than 200 kHz bandwidth
Author:
Funder
DARPA
Publisher
Acoustical Society of America (ASA)
Subject
Acoustics and Ultrasonics,Arts and Humanities (miscellaneous)
Link
http://asa.scitation.org/doi/pdf/10.1121/1.4874620
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