1. AIMSTM EUV - the actinic aerial image review platform for EUV masks;Hellweg,2011
2. Actinic inspection of multilayer defects on EUV masks;Barty,2005
3. Improving the performance of the Actinic Inspection Tool with an optimized alignment procedure;Mochi,2009
4. Development of actinic full-field EUV mask blank inspection tool at MIRAI-Selete;Terasawa,2009
5. Simulation of Multilayer Defects in Extreme Ultraviolet Masks