1. ISO 10110-5:2015, “Optics and photonics - Preparation of drawings for optical elements and systems - Part 5: Surface form tolerances” (2015)
2. ISO 10110-8:2010, “Optics and photonics - Preparation of drawings for optical elements and systems - Part 8: Surface texture; roughness and waviness” (2010)
3. National Ignition Facility wavefront requirements and optical architecture
4. Determination of the flare specification and methods to meet the CD control requirements for the 32-nm node using EUVL,;Chandhok,2004
5. Specification and control of mid-spatial frequency wavefront errors in optical systems,;Aikens,2008