SU-8 microcantilever with an aperture, fluidic channel, and sensing mechanisms for biological and other applications-Reference-Cited by-同舟云学术

SU-8 microcantilever with an aperture, fluidic channel, and sensing mechanisms for biological and other applications

Published:2014-09-15 Issue:3 Volume:13 Page:030501
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Gaitas Angelo¹,Hower Robert W.²

Affiliation:

1. Kytaro, Inc., 11200 SW 8th Street, MARC 430, Miami, Florida 33199, United StatesbFlorida International University, Electrical and Computer Engineering, 11200 SW 8th Street, MARC 430, Miami, Florida 33199, United States

2. Kytaro, Inc., 11200 SW 8th Street, MARC 430, Miami, Florida 33199, United States

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference18 articles.

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