Design and fabrication of ripple-free CMOS-compatible stacked membranes for airgap optical filters for UV-visible spectrum
Author:
Affiliation:
1. Technische Univ. Delft (Netherlands)
Publisher
SPIE
Reference14 articles.
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3. Optical transmission performance of a surface-micromachined Fabry–Pérot interferometer for thermal infrared
4. Surface-micromachined Bragg Reflectors Based on Multiple Airgap/SiO2 Layers for CMOS-compatible Fabry-perot Filters in the UV-visible Spectral Range
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1. Design and fabrication of ultrathin silicon-nitride membranes for use in UV-visible airgap-based MEMS optical filters;Journal of Physics: Conference Series;2016-10
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