Probability prediction of EUV process failure due to resist-exposure stochastic: applications of Gaussian random fields excursions and Rice's formula-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Probability prediction of EUV process failure due to resist-exposure stochastic: applications of Gaussian random fields excursions and Rice's formula

Published:2020-03-23 Issue: Volume: Page:
ISSN:
Container-title:Extreme Ultraviolet (EUV) Lithography XI
language:
Short-container-title:

Author:

Latypov Azat,Khaira Gurdaman,Fenger Germain L.,Sturtevant John L.,Wei Chih-I,De Bisschop Peter

Publisher

SPIE

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Towards efficient and accurate cost functions for EUVL stochastic-aware OPC correction and verification: via failure probability versus image and process variation band metrics;Optical and EUV Nanolithography XXXVII;2024-04-10

2. Principal components and optimal feature vectors of EUVL stochastic variability: applications of Karhunen-Loève expansion to efficient estimation of stochastic failure probabilities and stochastic metrics;Advances in Patterning Materials and Processes XLI;2024-04-09

3. Dynamic budget analysis of multiple parameters in a lithography system based on the superposition of light intensity fluctuations;Optics Express;2024-01-30

4. Applications of large field of view e-beam metrology to contour-based optical proximity correction modeling;Journal of Micro/Nanopatterning, Materials, and Metrology;2023-10-19

5. Calibration of Gaussian random field stochastic EUV models;Optical and EUV Nanolithography XXXV;2022-05-26

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP