Range pattern matching with layer operations and continuous refinements-Reference-Cited by-同舟云学术

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Range pattern matching with layer operations and continuous refinements

Published:2018-03-20 Issue: Volume: Page:
ISSN:
Container-title:Design-Process-Technology Co-optimization for Manufacturability XII
language:
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Author:

Tseng I-Lun,Lee Zhao Chuan,Li Yongfu,Perez Valerio,Tripathi Vikas,Ong Jonathan Yoong Seang

Publisher

SPIE

Reference10 articles.

1. DRC Plus: augmenting standard DRC with pattern matching on 2D geometries;Dai,2007

2. Geometric Pattern Match Using Edge Driven Dissected Rectangles and Vector Space

3. Efficient range pattern matching algorithm for process-hotspot detection

4. Efficient process-hotspot detection using range pattern matching;Yao,2006

5. DRC-based hotspot detection considering edge tolerance and incomplete specification;Yu,2014

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Litho-NeuralODE 2.0: Improving hotspot detection accuracy with advanced data augmentation, DCT-based features, and neural ordinary differential equations;Integration;2022-07

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