Infrared interferometry for rough surface measurements: application to failure characterization and flaw detection
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. In-plane coplanarity measurement by Talbot interferometer;Optical Metrology and Inspection for Industrial Applications IX;2023-01-05
2. Measuring the Roughness Parameters of Ground and Polished Optical Surfaces by High-Precision Laser Interferometry Methods;Journal of Communications Technology and Electronics;2022-12
3. Research on full-aperture surface shape in-situ measurement technology for grinding large diameter optics;Optical Metrology and Inspection for Industrial Applications VI;2019-11-18
4. Tear Film Interferometry and Corneal Surface Roughness;Investigative Opthalmology & Visual Science;2014-04-21
5. An unequal-arm Twyman-Green IR interferometer for monitoring the shape and quality of the surfaces of large optical items at the grinding stage;Journal of Optical Technology;2010-10-01
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