Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors-Reference-Cited by-同舟云学术

Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors

Published:2014-03-07 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Gu-Stoppel S.,Janes J.,Quenzer H. J.,Hofmann U.,Benecke W.

Publisher

SPIE

Reference11 articles.

1. High-Q MEMS Resonators for Laser Beam Scanning Displays

2. Specht, H., [MEMS-Laser-Display-Systems: Analyse, Implementierung und Testverfahrenentwicklung], Universitätsverlag Chemnitz, pp. 38–39 57–58 (2011)

3. Two-Axis Electromagnetic Microscanner for High Resolution Displays

4. A curved multimorph based electrothermal micromirror with large scan range and low drive voltage

5. A 2D-optical scanner actuated by PZT film deposited by Arc Discharged Reactive Ion-Plating (ADRIP) Method;Tani,2004

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