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2. Arbitrary 3D line width forms measurement simulations for the next-generation semiconductor circuits by scatterometry using the FDTD method;Shirasaki,2004
3. Arbitrary Cross Sections and Stack Forms Measurement Simulations for Semiconductor Circuits by Scatterometry;Shirasaki,2005
4. 3D Isolated and Periodic Grooves Measurement Simulations for the Semiconductor Circuits by Scatterometry Using the FDTD Methods and the Time Shortening Calculation Method;Shirasaki,2006
5. 3D Anisotropic Semiconductor Grooves Measurement Simulations (Scatterometry) using FDTD Methods;Shirasaki,2007