Author:
Watanabe Hisashi,Todokoro Yoshihiro,Hirai Yoshihiko,Inoue Morio
Cited by
15 articles.
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1. Resolution Enhancement Techniques and Mask Data Preparation;Electronic Design Automation for IC Implementation, Circuit Design, and Process Technology;2016-04-14
2. Photomask Fabrication;Handbook of Semiconductor Manufacturing Technology, Second Edition;2007-07-09
3. Advanced Optical Masks;Handbook of Photomask Manufacturing Technology;2005-04-07
4. The next generation of RET;SPIE Proceedings;2005-01-27
5. Plenary Paper: Resolution enhancement technology: The past, the present, and extensions for the future;PROC SPIE;2004