Author:
Gotszalk Teodor,Kopiec Daniel,Sierakowski Andrzej,Janus Paweł,Grabiec Piotr,Rangelow Ivo W.
Cited by
3 articles.
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1. Fast atomic force microscopy with self-transduced, self-sensing cantilever;Journal of Micro/Nanolithography, MEMS, and MOEMS;2015-07-27
2. Self-actuated, self-sensing cantilever for fast CD measurement;SPIE Proceedings;2015-03-19
3. Scanning probes in nanostructure fabrication;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2014-11