Author:
Puthankovilakam Krishnaparvathy,Scharf Toralf,Tan Qing,Herzig Hans Peter,Nguyen David,Vogler Uwe,Bramati Arianna,Voelkel Reinhard
Reference12 articles.
1. Optical lithography--thirty years and three orders of magnitude: the evolution of optical lithography tools;Bruning,1997
2. Recents Trends in Optical Lithography;Rothschild,2003
3. Pushing the limits of lithography
4. Difffraction effects in submicron contact or proximity printing
5. Diffraction Effects in Proximity Printing of Circular Aperature Array;Tsai,2007
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