A polarization optical measurement method based on spectroscopic ellipsometer and COMSOL simulation-Reference-Cited by-同舟云学术

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A polarization optical measurement method based on spectroscopic ellipsometer and COMSOL simulation

Published:2023-03-09 Issue: Volume: Page:
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Container-title:International Conference on Optoelectronic Materials and Devices (ICOMD 2022)
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Author:

Fang Huiwen,Yang Jinhong,Zhang Meijuan,Wei Yujiao,Zhang Wuji,Li Wenguang,He Shengnan,Wang Weihua

Publisher

SPIE

Reference16 articles.

1. Preparation of Zr-based thin-film metallic glass and determination of optical constants [J];Wu;Acta Photonica Sinica,2020

2. Mueller matrix measurement of asymmetric gratings[J];Jie;Journal of micro/nanolithography, MEMS, and MOEMS: JM3,2010

3. Mueller matrix ellipsometric detection of profile asymmetry in nanoimprinted grating structures[J];Xiuguo;Journal of Applied Physics,2014

4. Polarization-resolved Stokes-Mueller imaging: a review of technology and applications. [J];Spandana;Lasers in medical science,2019

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