Assessing the viability of multi-electron beam wafer inspection for sub-20nm defects

Author:

Thiel Brad,Lercel Michael,Bunday Benjamin,Malloy Matt

Publisher

SPIE

Reference8 articles.

1. International Technology Roadmap for Semiconductors, 2013 ed.

2. [Unpatterned Wafer Defect Inspection] in Handbook of Silicon Semiconductor Metrology;Huang,2001

3. Scanning Electron Microscopy and X-ray Microanalysis

4. High throughput defect detection with multiple parallel electron beams

5. Brain mapping in high resolution

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