Aberration compensation method for dual-focus beams considering the effect of spatial light modulators flyback regions-Reference-Cited by-同舟云学术

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Aberration compensation method for dual-focus beams considering the effect of spatial light modulators flyback regions

Published:2024-03-21 Issue:03 Volume:63 Page:
ISSN:0091-3286
Container-title:Optical Engineering
language:
Short-container-title:Opt. Eng.

Author:

Qiao Shi¹,Hu Jingpei²,Zeng Aijun²,Huang Huijie²

Affiliation:

1. Chinese Academy of Sciences, Shanghai Institute of Optics and Fine Mechanics, Department of Advanced Optical and Microelectronic Equipment, Shanghai, China

2. Chinese Academy of Sciences, Shanghai Institute of Optics and Fine Mechanics, Laboratory of Information Optics and Optoelectronic Technology, Shanghai, China

Publisher

SPIE-Intl Soc Optical Eng

Reference33 articles.

1. Advanced Dicing Technology for Semiconductor Wafer—Stealth Dicing

2. Analysis of internal crack propagation in silicon due to permeable pulse laser irradiation: study on processing mechanism of stealth dicing

3. Numerical simulation and validation of subsurface modification and crack formation induced by nanosecond-pulsed laser processing in monocrystalline silicon

4. Laser-Induced Microexplosion Confined in the Bulk of a Sapphire Crystal: Evidence of Multimegabar Pressures

5. Analysis of Processing Mechanism in Stealth Dicing of Ultra Thin Silicon Wafer

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