Nanoimprint lithography using disposable biomass template-Reference-Cited by-同舟云学术

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Nanoimprint lithography using disposable biomass template

Published:2016-04-01 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Hanabata Makoto,Takei Satoshi,Sugahara Kigen,Nakajima Shinya,Sugino Naoto,Kameda Takao,Fukushima Jiro,Matsumoto Yoko,Sekiguchi Atsushi

Publisher

SPIE

Reference24 articles.

1. Nanoimprint lithography

2. Applied Physics Letters;Woo,2007

3. Microelectronic Engineering;Kim,2008

4. Journal of Vacuum Science & Technology;Yang,2009

5. Microelectronic engineering;Cui,2006

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