Author:
Sparks Douglas,Massoud-Ansari Sonbol,Najafi Nader
Cited by
24 articles.
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1. An Experimental and Numerical Study on Glass Frit Wafer-to-Wafer Bonding;Micromachines;2023-01-08
2. Improved properties of the MEMS-type ion-sorption micropump;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-11
3. Comparative study of Au/Ti, Au/V and Au/Zr films oxygen gettering ability;Thin Solid Films;2016-10
4. Packaging;Reference Module in Materials Science and Materials Engineering;2016
5. Long-life micro vacuum chamber for a micromachined cryogenic cooler;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2015-11