Author:
Eibelhuber M.,Uhrmann T.,Glinsner T.
Reference4 articles.
1. Direct Imprinting of Dielectric Materials for Dual Damascene Processing;Stewart,2005
2. Discrete Track Recording (DTR) Media Fabricated using Nanoimprint Lithography;Dorsey,2004
3. A Moiré method for high accuracy alignment in nanoimprint lithography
4. Fabrication of 3D-photonic crystals via UV-nanoimprint lithography