Polymer microfluidic bioreactor fabrication by means of gray scale lithography technique

Author:

Sierakowski Andrzej1,Prokaryn Piotr1,Dobrowolski Rafał1,Malinowska Anna1,Szmigiel Dariusz1,Grabiec Piotr1,Trojanowski Damian2,Jakimowicz Dagmara2,Zakrzewska-Czerwinska Jolanta2

Affiliation:

1. Institute of Electron Technology (Poland)

2. Univ. of Wrocław (Poland)

Publisher

SPIE

Reference10 articles.

1. Rai-Choudhury, P., [Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography], Institution of Engineering and Technology, London, (1997)

2. Relationship between the slope of the HD curve and the fundamental resist process contrast

3. Lithography and line-edge roughness of high-activation-energy resists;Masuda,2000

4. Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching

5. Simple Microfluidic Devices for in vivo Imaging of C. elegans, Drosophila and Zebrafish,;Mondal;J. Vis. Exp.,2012

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