Spectral purity Al/Yb/Al filter for vacuum ultraviolet at 50 to 100 nm-Reference-Cited by-同舟云学术

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Spectral purity Al/Yb/Al filter for vacuum ultraviolet at 50 to 100 nm

Published:2020-05-27 Issue:05 Volume:59 Page:1
ISSN:0091-3286
Container-title:Optical Engineering
language:
Short-container-title:Opt. Eng.

Author:

Zhu Jingtao¹,Ji Bin¹,Jiang Hui²,Zhu Jie¹,Zhou Tao¹,Zhu Hangyu¹,Zheng Lei³,Zhao Yidong³,Cui Mingqi³,Zhao Jiaoling⁴

Affiliation:

1. Tongji University, MOE Key Laboratory of Advanced Micro-Structured Materials, School of Physics Scie

2. Chinese Academy of Sciences, Shanghai Advanced Research Institute, Shanghai Synchrotron Radiation Fa

3. Chinese Academy of Sciences, Institute of High Energy Physics, Beijing Synchrotron Radiation, Shijin

4. Chinese Academy of Sciences, Shanghai Institute of Optics and Fine Mechanics, Key Laboratory of Mate

Funder

National Natural Science Foundation of China

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 不同本底真空制备的Yb/Al多层膜结构和反射率研究;ACTA PHOTONICA SINICA;2021

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