Silicon oxynitride based scratch resistant anti-reflective coatings
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SPIE
Reference5 articles.
1. Improved scratch resistance for antireflective coatings on sapphire
2. An Overview of the Scratch Resistance of Automotive Coatings: Exterior Clearcoats and Polycarbonate Hardcoats
3. Silicon Nitride Films Deposited by RF Sputtering for Microstructure Fabrication in MEMS
4. Effects of post-deposition annealing on the mechanical and chemical properties of the Si3N4/NbN multilayer coatings
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Plasma emission spectroscopy and optical properties of reactive-sputtered silicon oxynitride films;Journal of Physics D: Applied Physics;2024-04-18
2. Nanoindentation Hardness and Practical Scratch Resistance in Mechanically Tunable Anti-Reflection Coatings;Coatings;2021-02-12
3. A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film;Micromachines;2019-08-20
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