Signal formation in depth-scanning 3D interference microscopy at high numerical apertures

Author:

Lehmann Peter,Xie Weichang

Publisher

SPIE

Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Analysis of interference microscopy in the spatial frequency domain;Journal of Physics: Photonics;2021-01-01

2. A metrological characterization of the SPEED test-bed PIAACMC components.;Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation IV;2020-12-13

3. Two-dimensional modelling of systematic surface height deviations in optical interference microscopy based on rigorous near field calculation;Journal of Modern Optics;2020-06-24

4. Model-based dimensional optical metrology;Optics and Photonics for Advanced Dimensional Metrology;2020-04-01

5. Spectral composition of low-coherence interferograms at high numerical apertures;Journal of the European Optical Society-Rapid Publications;2019-04-11

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