Diffractive beamshaping elements at the fabrication limit-Reference-Cited by-同舟云学术

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Diffractive beamshaping elements at the fabrication limit

Published:1996-10-01 Issue:10 Volume:35 Page:2779
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Singer Wolfgang

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Micro-optics: enabling technology for illumination shaping in optical lithography;SPIE Proceedings;2014-03-31

2. Optically-dressed resonant Auger processes induced by high-intensity x-rays;New Journal of Physics;2013-08-29

3. Design and simulation of illuminator with micro scanning slit array for NA 0.75 lithography system;SPIE Proceedings;2013-04-12

4. Wafer-scale micro-optics fabrication;Advanced Optical Technologies;2012-01-01

5. References;Thin Film Micro-Optics;2007

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