Mechanism and experimental study on three-dimensional facula shaping in femtosecond laser micromachining-Reference-Cited by-同舟云学术

Mechanism and experimental study on three-dimensional facula shaping in femtosecond laser micromachining

Published:2015-10-20 Issue:10 Volume:54 Page:105111
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Pan Xuetao¹,Tu Dawei²,Cai Jianwen³

Affiliation:

1. Shanghai University, School of Mechatronic Engineering and Automation, Yanchang Road 149, Shanghai 200072, ChinabChangzhou Institute of Technology, School of Electrical and Photoelectric Engineering, Tongjiang Road 299, Changzhou 213002, ChinacChangzhou K

2. Shanghai University, School of Mechatronic Engineering and Automation, Yanchang Road 149, Shanghai 200072, China

3. Changzhou Institute of Technology, School of Electrical and Photoelectric Engineering, Tongjiang Road 299, Changzhou 213002, ChinacChangzhou Key Laboratory of Optoelectronic Materials and Devices, Tongjiang Road 299, Changzhou 213002, China

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference19 articles.

1. Two-photon lithography for microelectronic application

2. Finer features for functional microdevices

3. Femtosecond laser waveguide micromachining of PMMA films with azoaromatic chromophores

4. Laser direct writing of volume modified Fresnel zone plates

5. Fabrication of microlens arrays in polycarbonate with nanojoule energy femtosecond laser pulses

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1. Mechanism and Experimental Study of Femtosecond-Laser Super-Resolution Processing Based on Beam Shaping Technology;Journal of Russian Laser Research;2020-03

2. Research on the effect of coverage rate on the surface quality in laser direct writing process;International Journal of Modern Physics B;2017-07-26

3. Effect of the Scanning Step on the Surface Quality of Microdevices in Femtosecond-Laser Micromachining and its Optimization;Journal of Russian Laser Research;2016-11