Can ionic liquid additives be used to extend the scope of poly(styrene)-block-poly(methyl methacrylate) for directed self-assembly?-Reference-Cited by-同舟云学术

Can ionic liquid additives be used to extend the scope of poly(styrene)-block-poly(methyl methacrylate) for directed self-assembly?

Published:2014-07-21 Issue:3 Volume:13 Page:031304
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Bennett Thomas M.¹,Pei Kevin²,Cheng Han-Hao³,Thurecht Kristofer J.⁴,Jack Kevin S.⁵,Blakey Idriss¹

Affiliation:

1. University of Queensland, Australian Institute for Bioengineering and Nanotechnology, Brisbane, Queensland 4072, AustraliabCentre for Advanced Imaging, Brisbane, Queensland 4072, Australia

2. University of Queensland, Australian Institute for Bioengineering and Nanotechnology, Brisbane, Queensland 4072, Australia

3. Australian National Fabrication Facility, QLD Node, Brisbane, Queensland 4072, Australia

4. University of Queensland, Australian Institute for Bioengineering and Nanotechnology, Brisbane, Queensland 4072, AustraliabCentre for Advanced Imaging, Brisbane, Queensland 4072, AustraliadARC Centre of Excellence in Convergent Bio-Nano Science and Techno

5. Centre for Microscopy and Microanalysis, Brisbane, Queensland 4072, Australia

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference64 articles.

1. Polymer self assembly in semiconductor microelectronics

2. Advanced Materials

3. Directed Self-Assembly of Block Copolymers for Nanolithography: Fabrication of Isolated Features and Essential Integrated Circuit Geometries

4. Directed Assembly of a Cylinder-Forming Diblock Copolymer: Topographic and Chemical Patterns

5. Directed block copolymer self-assembly for nanoelectronics fabrication

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