Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference39 articles.
1. W. B. Veldkamp , “Overview of micro-optics: past, present, and future,” inMiniature and Micro-Optics, Proc. SPIE 1544 (1991).
2. Silicon as a mechanical material
3. Characterization and reliability of a switch matrix based on MOEMS technology
4. S. Sinzinger and J. Jahns ,Microoptics, Wiley-VCH Verlag (1999).
5. MEMS-based sample preparation for molecular diagnostics