Self-calibration of a scanning white light interference microscope
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference16 articles.
1. F. A. Jenkins and H. E. White, Chapter 13 inFundamentals of Optics, 259–285, McGraw-Hill Kogakusha Ltd, Tokyo (1976).
2. Precision Optical Wavefront Measurement
3. White-Light Interferometric Thickness Gauge
4. Absolute optical ranging using low coherence interferometry
5. Three-dimensional image realization in interference microscopy
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