Three-dimensional step–height measurement using sinusoidal wavelength scanning interferometer with four-step phase-shift method
Author:
Affiliation:
1. Niigata University, Department of Electrical and Electronics Engineering, 8050 Ikarashi-2, Niigata 950-2102, Japan
2. Niigata University, Graduate School of Science and Technology, 8050 Ikarashi 2, Niigata 950-2102, Japan
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
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